Fix another major performance regression in LiveVariables by not canonicalizing the underlying ImmutableSets on every analyzed statement (just at merges).  Fixes <rdar://problem/10087538>.

git-svn-id: https://llvm.org/svn/llvm-project/cfe/trunk@140958 91177308-0d34-0410-b5e6-96231b3b80d8
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